Standard Specifications of JEL GCR4280-300-AM:
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | GCR4280-300-AM | |||
| Carrying Object | SEMI standard up to 300mm silicon wafer | |||
| Wafer Holding Method | By vacuum suction | |||
| Robot Model Type | Horizontal and multi-joint type | Control Axis | 4-axis | |
| Motor Type | AC servo motor | |||
| Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 953mm | 335deg | 300mm | ||
| Carrying Speed | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 833mm/1.3sec | 335deg/1.2sec | 300mm/1.0sec | ||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: AC200V single phase ±10% 2kVA; Vacuum: -53kPa or more | |||
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