Characteristics of JEL GTCR5280-300-AM:
A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.
Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
Execution of origin search is not required by using the servo motors with absolute encoders.
- 3 FOUP access is available without a track.
- Twin end-effector reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handling by S-curved speed control and optimizing pass control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications of JEL GTCR5280-300-AM
Specifications of Robot | ||||
---|---|---|---|---|
Robot Model | GTCR5280-300-AM | |||
Carrying Object | Up to 300mm silicon wafer | |||
Wafer Holding Method | By vacuum suction | |||
Robot Model Type | Horizontal and multi-joint type | Control Axis | 5-axis | |
Motor Type | AC servo motor | |||
Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
953mm | 335deg | 300mm | ||
Carrying Speed | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
833mm/sec | 250deg/sec | 300mm/sec | ||
Repeatability | Within ±0.1mm | |||
Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
Utility | Power: AC200V Single phase ±10% 2kVA; Vacuum: -53kPa or more | |||
Mass | Approx. 50kg | |||
Specifications of Controller | ||||
Controller Model | C5000S series | |||
Interface | RS232C and parallel photo I/O |
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