Characteristics of JEL GTVCR5330-060-AM:
Achieved cost reduction while maintaining the performance and functions of conventional robot GTVHR5000 series.
Transfers to the parallel stages in the vacuum chamber and supports various layouts, reducing footprint and vacuuming volume.
Simplification of the chamber layout leads to the cost reduction.
Suitable to the inline layout.
Execution of origin search is not required by using the servo motors with absolute encoders.
Standard Specifications of JEL GTVCR5330-060-AM:
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | GTVCR5330-060-AM | |||
| Carrying Object | Wafer up to 300mm | |||
| Robot Model Type | Horizontal and multi-joint type | Control Axis | 5-axis | |
| Motor Type | AC servo motor | |||
| Operating Range | 3rd Joint Center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 635mm | 360deg | 60mm | ||
| Carrying Speed (Ave.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 640mm/sec | 160deg/sec | 60mm/sec | ||
| Carrying Speed (Max.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 950mm/sec | 200deg/sec | 85mm/sec | ||
| Resolution | 1st Joint Axis (J1-axis) 2nd Joint Axis (J2-axis) |
3rd Joint Axis (J3-axis) 3rd Joint Axis (J5-axis) |
Z-Axis (J4-axis) | |
| 0.00081deg 0.00081deg |
0.00072deg 0.00072deg |
0.98µm | ||
| Repeatability | Within ±0.1mm | |||
| Handling Level | 219mm (Mounting level to upper end-effector level) | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1 x 10-6Pa | |||
| Utility | Power: AC200 to 230V 2kVA 50/60Hz | |||
Reviews
There are no reviews yet.