JEL JCR4400-400-AM

Product Features
This is a 4-axis horizontal articulated clean robot equipped with automatic alignment functionality for PLP support.

• Capable of accessing parallel layout configurations.
• Non-contact alignment enables high-precision transport.
• Supports a payload of up to 10 kg.

Standard Specifications
These are the representative specifications for the JCR4400-400-AM robot (equipped with automatic alignment functionality for PLP support).

Robot Specifications of JEL JCR4400-400-AM

• Model: JCR4400-400-AM
• Transfer Object: 500 mm x 500 mm substrate
• Wafer Holding Method: Vacuum suction using a chuck
• Mechanical Structure: Horizontal articulated type
• Control Axes: 4 axes
• Motor Type: AC servo motor
• Operating Range:
  • Workpiece center reach: 1290 mm
  • Rotation angle (θ-axis): 330 degrees
  • Vertical stroke (Z-axis): 400 mm
• Transfer Speed:
  • Arm (R-axis): 1170 mm/1.6 sec (cylindrical movement)
  • Rotation angle (θ-axis): 330 degrees/1.5 sec
  • Vertical stroke (Z-axis): 400 mm/1.4 sec
• Resolution:
  • Joint 1 axis (J1 axis): 3.5 x 10⁻³ degrees
  • Joint 2 axis (J2 axis): 1.8 x 10⁻³ degrees
  • Joint 3 axis (J3 axis): 1.8 x 10⁻³ degrees
  • Z-axis (J4 axis): 2.4 x 10⁻³ degrees
• Repeatability: Within ±0.2 mm
• Cleanliness:
  • Robot body: 0.3 µm/cf, Class 10 (with exhaust at the drive unit)
• Utilities:
  • Power: Single-phase AC 200V ±10%, 4 kVA
  • Vacuum: -53 kPa or higher
• Weight:
  • Robot body: Approx. 120 kg

Controller Specifications

• Controller Model: C5000S Series
• Interface: RS232C, Parallel Photo I/O

>>> Read more: Semiconductor Equipment