JEL JVCR4330-060-AM

Characteristics of JEL JVCR4330-060-AM

Horizontal and multi-joint type vacuum robot for Micro LED applications.

• Suitable for access to parallel layout configurations.
• Maximum payload capacity of 10 kg.

Standard Specifications

Standard specifications with JVCR4330-060-AM (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED).

Robot Specifications of JEL JVCR4330-060-AM:

• Robot Model: JVCR4330-060-AM
• Carrying Object: 700 mm susceptors (10 kg)
• Substrate Holding Method: Friction retention by O-ring
• Robot Model Type: Horizontal and multi-joint type
• Control Axis: 4-axis
• Motor Type: AC servo motor
• Operating Range:
  • From robot center to wafer center: 1290 mm
  • Rotation Angle (Theta-axis): 360 degrees
  • Vertical Stroke (Z-axis): 60 mm
• Carrying Speed:
  • Arm (R-axis): 640 mm/4.0 sec
  • Rotation Angle (Theta-axis): 360 degrees/5.0 sec
  • Vertical Stroke (Z-axis): 60 mm/2.0 sec
• Resolution:
  • 1st Joint Axis (J1 axis): 8.1 x 10⁻⁴ degrees
  • 2nd Joint Axis (J2 axis): 8.1 x 10⁻⁴ degrees
  • 3rd Joint Axis (J3 axis): 7.2 x 10⁻⁴ degrees
  • Z-axis (J4 axis): 0.98 µm
• Repeatability: Within ±0.1 mm
• Cleanliness: Robot main body: 0.1 µm/cf Class 1
• Utility:
  • Power: AC 200V single phase ±10%, 4.0 kVA
• Mass: Robot main body: Approx. 90 kg

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