JEL STWCR4160-300-PM

Outstanding features of JEL STWCR4160-300-PM:

This is a 4-axis waterproof cylindrical coordinate clean robot designed to handle wafers under acidic or alkaline mist (IP64) conditions.

• It supports edge grip and inversion functions for 300mm wafers.
• Corrosion resistance of the arm is ensured with Teflon coating.
• Waterproof functionality is secured with V-shaped seals in the arm joints.
• The use of Z-axis bellows further enhances waterproof capability.
• Cycle time can be reduced using the twin-arm configuration.
• It uses a 2-phase stepping motor.
• S-shaped acceleration and deceleration control enables high-speed and high-precision wafer transfer.
• Transfer methods: Vacuum, Edge grip, Passive.
• Payload: Less than 3kg (including wrist block, chuck, and transferred object).

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