Standard Specifications of JEL SVCR3330S-060-PM:
| Specifications of Robot | ||||
|---|---|---|---|---|
| Robot Model | SVCR3330S-060-PM | |||
| Carrying Object | 342mm tray x 2 (Representative example) | |||
| Robot Model Type | Cylindrical coordinate type | Control Axis | 3-axis | |
| Motor Type | Stepping motor | |||
| Operating Range | From the robot center to the wafer center | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 1075mm | 330deg | 60mm | ||
| Carrying Speed (Ave.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 250mm/sec | 90deg/sec | 30mm/sec | ||
| Carrying Speed (Max.) | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| 380mm/sec | 135deg/sec | 45mm/sec | ||
| Resolution | Arm (R-axis) | Rotation Angle (Theta-axis) | Vertical Stroke (Z-axis) | |
| Below 65µm | 0.0056deg | 2.777µm | ||
| Handling level | 188.5mm (Mounting level to end-effector level) | |||
| Repeatability | Within ±0.2mm | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1.33×10-6Pa | |||
| Utility | Power: DC24V±10% 11A | |||
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