JEL SWCR3160CS

Characteristics of JEL SWCR3160CS:

Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64).

Flip and edge grip functions are available.

• Corrosion protection for arm by Teflon coating
• V-type seals are used for waterproof of arm joint.
• Viton seals are used for parts joint.
• Bellows are used for waterproof of vertical axis.
• Motion monitoring is available.
• RS232C and parallel photo I/O are standard for control.
• 2-phase stepping motor installed in all axes.
• High-speed, high-accuracy wafer handlingby S-curved speed control.
• Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
• Optimal end-effector is selectable according to the carrying object and line layout.

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