Product Features:
- Material Specifications: Supports 6” ~ 12” Frame, Wafer
- UV Unit: 1 set of LED UV module
- UV Wavelength: 365 nm
- UV Exposure Energy: 50~500 mW/cm², real-time monitoring of exposure energy, programmable energy adjustment
- UV Exposure Uniformity: ≤±10%
- UV Exposure Time: 0~999 seconds, programmable
- Scanning Speed: 0~100 mm/s, programmable
- Lightbox Temperature: Real-time monitoring of lamp head and lightbox temperature
- UV Lamp Type: LED cold light source, strong energy, long lifespan, low energy consumption, low heat generation
- Control Unit: PLC and touch screen
- Loading/Unloading: Manual
- Power Supply: Single-phase 220V, 10A
- Gas: Nitrogen (optional)
- Equipment Casing: White painted casing
- Equipment Dimensions: 870mm (W) x 1080mm (D) x 1170mm (H)
- Net Weight: Approximately 220kg
>>> See more: List of Semiconductor Equipment
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