Main configuration of the fully automatic Wafer Sorter STK-3300:
- Dual-arm Robot: 1 set (different robot models can be configured based on requirements)
- Loadport: 2 sets (suitable for FOUP, FOSB)
- Fan Filter Unit (FFU): 1 set
- Static eliminator (Ionizer): 1 set
- Aligner: 1 set
- OCR: 1 set
Main performance of the fully automatic Wafer Sorter STK-3300:
- UPH (Units per hour): ≥200 wafers
- MTBF (Mean Time Between Failures): >1000 hours
- MTTR (Mean Time to Repair): <1 hour
- Up Time: ≥ 99%
Specifications of the fully automatic Wafer Sorter STK-3300:
- Wafer diameter: 12″ wafer
- Wafer thickness: 500 ~ 775 microns
- Wafer type: Silicon
- Carrier type: Standard 12-inch FOUP, FOSB
- Robot precision: ±0.1mm
- Aligner precision: ±0.1mm; ±0.1°
- Anti-static control: Ionizing bar
- Control unit: Industrial PC control with 17” touch screen
- Safety protection: Door interlock sensor and emergency stop button/safety light curtain (optional)
- Power supply voltage: Single-phase AC 220V, 20A
- Compressed air: 5 kg clean dry air, flow rate of 100 liters/min
- Machine casing: White-painted metal casing
- Dimensions: 1360mm (W) x 1800mm (D) x 2000mm (H)
- Net weight: Approx. 800kg
>>> See more: List of Semiconductor Equipment
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